高温超导薄膜微波表面电阻测试方法的改进

介绍了一种12 GHz附近的高温超导薄膜微波表面电阻Rs测试系统。该系统采用低损耗高介电常数的蓝宝石，构成工作在TE011+δ谐振模式的介质谐振器，在77 K时，利用测量介质谐振器的Q值得到单片高温超导薄膜的微波表面电阻Rs。分析了其耦合装置对校准物理模型的影响，通过改进耦合装置可提高系统测试的准确度。该系统与前三代测试系统进行比较，其测试准确度有明显地提高。A kind of High Tc superconductive thin film microwave surface resistance test system around 12 GHz is described in this paper. The surface resistance of a single piece of high Tc superconductive thin film can be measured by a sapphire resonator with TE011+δ mode non-destructivity, at 77 K. By measuring the value of the resonator’s quality factor, the surface resistance of testing sample can be also determined. And the influence of coupling device on calibrating physical model is also analyzed in this paper. Then testing accuracy of the system can be raised by improving coupling device. The test system is compared with former generations, and the testing accuracy is raised obviously.