双针表面形貌测量系统的研究

介绍一种新颖的双针表面形貌测量系统,它将光学位移传感器和触针位移传感器巧妙地结
合在一起,从而具有接触和非接触两种测量手段。与单一测量模式的表面形貌测量仪器相比,它的性能 价格比更高,应用范围更广。该测量系统已投入实用,接触测量模式下其垂直测量范围和垂直分辨率分别是1 mm和10 nm,非接触测量模式下分别是500μm和3 nm。实践证实,该系统使用灵活,可靠性高。
关键词: 表面形貌; 接触P非接触测量; 表面特征提取
Abstract : A dual2stylus surface measurement instrument , developed for the characterization of engineering sur2 faces , is presented. The instrument is of a hybrid type and is capable of contact and non2contact measurement , mak2 ing it suitable for a wider range of applications. It has an optical displacement sensor and a stylus displacement sen2 sor. For contact measurement , the vertical measurement range and resolution of the instrument are 1 mm and 10 nm , respectively. For non2contact measurement , they are 500μm and 3 nm , respectively. The instrument has been suc2 cessfully used for several forensic applications , demonstrating its unique flexibility and high reliability as a novel sur2 face topography instrument.
Key words : Surface topography ; ContactPnon2contact measurement ; Surface characterization