基于激光莫尔信号精密定位装置的高速高精度定位控制

介绍了激光干涉莫尔信号差动式精密定位方法，提出了精密定位装置的粗控和微控两段式控制方式，扩大了装置的定位控制范围，又有效地缩短精密定位时间，实现装置宽控制范围的高速高精度控制。　
关键词：激光莫尔信号，精密定位控制，定位时间，定位精度
Control over high alignment accuracy and high speed of a precision alignment system based on laser moire signals ZHOU Lizhong1, Xie Yong1, Furuhashi Hideo2, Uchida Yoshiyukl2
(1.Information Engineering School,Yangzhou Univ. ,Yangzhou 225009,China;2.Information Network Engineering Department of Aichi Instiute of Technology.Japan) Abstract：This article introdnces principle of the differential precision positioning using laser Moire signals and discusses the macro-control type and micro-control type of a precision alignment system. The principle expands the control range and effectizely shortens precision alignment time for precision alignment. It com fulfil control over high alignment accuracy and high speed of a precision alignment system.　
Key Words：Laser moire signals，Control over precisioni positioning，Alignment time， Alignment accuracy