引信中应用的加速度传感器的研制

讨论了应用于引信中的高g微阵列式加速度传感器的设计理论、布阵方法和微加工工艺。讨论过程中，针对测量不同的加速度值，利用了不同的设计方法和加工工艺及二维传感阵列的布阵设计上的特点，将微加工中三维加工工艺与平面加工工艺相结合，利用体加工技术和高深宽比刻蚀技术，研制出了微阵列加速度传感器的样品。经测试表明符合使用要求，其结果为实用化奠定了基础。
关 键 词 微传感器; 阵列式; 加速度; 微加工技术

Abstract In this paper the method of the design and the manufacture for the high g micro sensor array of the acceleration for the use of the fuse system are presented systematically, synthetically. It is applied the different method of the design and the technique for measuring the different value of the acceleration, and had the different sensor array in the manufacture of the micro sensor array of the acceleration. It is used the 3-D technique union of the 2-D technique of the integrated circuit. This sample meet the demand which is based upon this paper for the application.
Key words micro sensor; array; acceleration; micro machining technology

Manufacture of Micro Sensor of Acceleration in Fuse System