H-S波前传感器在测量光束质量因子M2中的应用

仿真研究了H-S 测量M 2因子等光束质量指标的全过程和可行性。结果表明，由H-S 测
量的圆形光束的M 2因子值与原始光束的M 2因子值基本相当，有很好的一致性。由此认为，H-S除了可以评价远场测量系统探测得到的光斑的各种量，比如PSF,OTF,衍射极限,环围能量等远场特性，而且还可以从M 2因子来说明光束质量的特性。
关键词：波前传感器；光束质量;波像差
Abstract: The whole process for measuring M 2 factor etc. beam quality indexes with Hartmann-Shack wavefront sensor and feasibility are simulated. The result show that 2 M factor value of circular beam measured with Hartmann-Shack wavefront sensor is basically consistent with the 2 M factor value of the original beam. From this we can see, apart from evaluating various spot parameters such as point spread function, optical transfer function, diffraction limit and encircle energy etc. far-field characteristics, which are obtained in detection by the far-field measuring system, the quality characteristics of beam can also be described from 2 M factor value.
Key words: Wave-front sensors；Beam quality；Wave-front aberration