具有位移感知功能的超磁致伸缩微位移执行器的研究

采用新型的功能材料——超磁致伸缩材料作为微位移器件, 研制了一种具有位移感知功能的超磁致伸缩微位移执行器, 并建立了其微位移闭环控制系统. 提出了一种高分辨率、无摩擦、传感ö位移传递一体化的圆形膜片式柔性结构, 作为超磁致伸缩微位移执行器的微位移传递和感知机构. 应用薄板弯曲理论得出了相应的挠度、应变变化率的解析表达式及分布曲线, 确定了微位移感知传感器的分布形式, 实现了执行器的微位移感知功能. 同时,
对研制的具有位移感知功能的超磁致伸缩微位移执行器及其微位移闭环控制系统进行实验研究, 结果表明: 执行器的微位移感知灵敏度和系统的微位移闭环控制精度较高.
关键词: 超磁致伸缩; 微位移执行器; 感知; 柔性结构
Abstract: A giant magneto st rict ive m icrodisp lacement actuato r w h ich has the funct ion of sensing it s disp lacement and w h ich uses a new type of funct ionalmaterials (giant magneto st rict ive materi2 als) as it s m icrodisp lacement device has been developed. A m icrodisp lacement clo sed loop cont ro l system is also built. A k ind of circular membrane f lexible st ructure w ith h igh dist inguishability, zero f rict ion, and integrated sensing2t ransferring2disp lacement capability, is p ropo sed to be used as a mechanism to t ransfer and sense the actuato r’sm icrodisp lacement. The analysis fo rmulas and the dist ribut ion curves of def lect ion and variance rat io of st rain are obtained by using circular p late bending theo ry. O n basis of th is, the dist ribut ion of the senso rs that sense the actuato r’s disp lace2 ment is obtained, and the actuato r’s disp lacement2sensing funct ion is realized. A t the same t ime,
experimental studies on the actuato r and it sm icrodisp lacement clo sed loop cont ro l system are car2 ried out. The result s show that the sensit ivity of the actuato r and the p recision of the system’s clo sed loop cont ro l are imp roved.
Key words: giant magneto st rict ion; m icrodisp lacement actuato r; sensing; f lexible st ructure