压阻式金刚石压力传感器的优化设计

介绍了一种新型金刚石高温压力传感器的优化设计方法。采用薄板弯曲理论研究了均匀载荷作用下多晶金刚石方膜在小挠度和大挠度下的应变分布情况。对设计时应当考虑的主要问题包括金刚石力敏电阻条的掺杂浓度,电桥的形式,电阻条在膜片上的分布以及电阻条的有效长度和形状等进行了讨论。利用模拟程序确定了力敏电阻条的最优有效长度,分析了敏感膜片厚度,方块电阻等因素对电阻条有效长度和输出响应的影响。
关键词: 金刚石; 压力传感器; 灵敏度; 优化设计
Abstract :Optimum design considerations for poly2diamond piezoresistive pressure sensors are demonstrated. The strain distribution based on small and large deflection theories of diamond square diaphragm was studied using theories of plate bend. Some main problems which should be taken into account during design , including the dopant concentration of resistors ,the configuration of Wheatstone bridge ,the arrangement of resistors on square
diaphragm and the effective length and shape of resistors , were discussed. The optimum effective length of resis2 tors has been calculated by a simulation program ,and the effects of thickness of square diaphragm and sheet resis2 tance on the effective length and output responses were analyzed.
Key Words :diamond ; pressure sensor ; sensitivity ; optimum design