多孔Al2O3薄膜感湿材料的湿敏特性研究

通过对阳极氧化多孔Al2O3 薄膜感湿材料的制备工艺及其电容湿敏特性进行研究,将阳极氧化参数对多孔Al2O3 薄膜的结构和形态的影响与多孔Al2O3 薄膜作为湿度传感器感湿材料的湿敏特性联系起来进行分析,为优化制备工艺参数提供更充分的实验数据,使新型多孔Al2O3 薄膜湿度传感器具有更好的感湿特性。
关键词: 多孔Al2O3 薄膜; 湿度传感器; 阳极氧化
Abstract : The preparation technologies and the capacitance humidity sensitive characters of anodic oxidation porous Al2O3 thin film have been investigated. The humidity response characters had been analyzed with the af2 fection of anodic oxidation parameters on the structure and morphology of porous Al2O3 thin film ,as a high quali2 ty humidity response material of humidity sensor. So it could put forth more sufficient experiment datum to im2
prove the processing parameters and made this new porous Al2O3 thin film humidity sensor with more splendid humidity response properties.
Key words : porous Al2O3 thin film; humidity sensor ; anodic oxidation